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dilo servicing machinery Sulfur Hexafluoride station

dilo servicing machinery Sulfur Hexafluoride station

Sulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). SF6 is applied in the above process as an etching gas.

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    SF6 Gas Servicing Equipment. Sulfur Hexafluoride (SF6) is an excellent gaseous dielectric for high voltage power applications. It has been used extensively in high voltage circuit breakers and other switchgear employed by the power industry. Applications for SF6 include gas insulated transmission lines and gas insulated power distribution

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